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Engineering Particles & Slurries for Chemical Mechanical Planarization (Cmp) of Shallow Trench Isolation (Sti) Structure
Grant
Overview
Affiliation
Identity
View All
Overview
date/time interval
August 1, 2010 - July 31, 2012
awarded by
National Science Foundation
Sinmat
subcontracted through
Sinmat
Company
administered by
Particle Engineering Research Center
total award amount
60000.00
direct costs
42547.00
sponsor award ID
UF-Sinmat10-00089201
local award ID
00078517
Affiliation
contributor
Moudgil, Brij
Principal Investigator
Identity
PeopleSoft Contract Number
00078517