Selective Etching of Gaas Over Al0.2Ga0.8as Semiconductor in Pulsed Dc Bcl3/Sf6 Plasmas Academic Article Conference Paper

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authors

publication date

2012-10-01

has subject area

published in

Thin Solid Films Journal

Web of Science ID

000309905900056

Digital Object Identifier (DOI)

https://doi.org/10.1016/j.tsf.2011.10.205

start page

245

end page

248

volume

521