A Piezoelectric Unimorph Actuator Based Tip-Tilt-Piston Micromirror With High Fill Factor and Small Tilt and Lateral Shift Academic Article
Overview
publication date
- 2011-06-01
has subject area
published in
- Sensors and Actuators A-Physical Journal
Identity
Web of Science ID
- 000291286300043
Digital Object Identifier (DOI)
Additional Document Info
start page
- 495
end page
- 501
volume
- 167